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SPS Polos SPIN 150i Spincoater

Specifications

  • Spin speed up to 12,000 rpm
  • Spin acceleration up to 51,000 rpm/s
  • Substrate sizes from 5mm up to 150mm diameter wafer or 20mm x 20mm substrates
  • Multistep and multicycle programming
  • Clockwise and counter-clockwise spin
  • Puddle function
  • Wash function
  • Central dispensing syringe option
  • Vacuum chucks and fragment chuck

Contact
Hartmut Hedderich
BRWN 4165B
560 Oval Drive
West Lafayette, IN 47907
(765) 494-6543
Email: hhedderi@purdue.edu

Purdue University, West Lafayette, IN 47907 (765) 494-4600

Department of Chemistry, 560 Oval Drive, West Lafayette, Indiana 47907-2084 | Telephone: (765) 494-5200 | Fax: (765) 494-0239

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